ISSN 1017-2548(Print)
ISSN 2234-8530(Online)
Volume 39, Number 8
JKCSEZ 39(8)
April 20, 1995 

Using two XPS instruments with different types of electron analyzer, effects of transmission functions of the instruments and employing various background subtraction methods on XPS quantification were considered. With corrections for the energy dependence of the spectrometer transmission functions, variations of photoelectron intensity ratios for various samples were reduced by a factor of 2.4 between the instruments. Photoelectron intensity values were compared using various background subtraction methods: linear, Shirley's, Tougaard's, and a deconvolution method using a backscattered electron energy loss spectrum. The application of each method resulted in similar variations, with no apperent systematic differences.