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Journal of the Korean Chemical Society (JKCS)

ISSN 1017-2548(Print)
ISSN 2234-8530(Online)
Volume 35, Number 6
JKCSEZ 35(6)
December 20, 1991 

 
Title
A Study on the Comparing the Structure of Bulks with Thin Films of Amorphous Ta-IPA using XRD

X-선 회절을 이용한 비정질 Ta-IPA 괴상과 박막의 구조 비교에 관한 연구
Author
Dai Hyun Yoon, Hwa Min Kim

윤대현, 김화민
Keywords
Abstract
Sol-gel법을 통하여 만들어진 비정질 Ta-IPA 괴상과 박막을 25℃와 340℃로 열처리한 구조의 차이점과 구조수와의 관계를 TG-DTA, IR과 X-선회절 강도측정으로부터 구한 동경분포곡선 등을 이용하여 알아보았다. 각 시편들을 L-Ta2O5 결정의 물성 및 동경분포곡선(calc-RDF)과 비교하였다. 박막은 8면체-TaO6로 괴상보다 작은 cluster로 구성되어 있었다.

The structural variation process and relation of water of amorphous Ta-IPA bulk and thin film upon heat-treatment conditions of 25℃ and 340℃ have been studied by using the radial distribution functions (RDFobs) estimated from the X-ray diffraction intensities, TG-DTA and Infrared spectrophotometer. The expected Ta-IPA structure was determined by comparing the RDFobs with that for RDFcalc. The structure of specimens prepared by sol-gel method is basically based on the L-Ta2O5 crystal. Thin film of samples are mainly composed of octahedral TaO6 and have smaller cluster than bulk samples.

Page
653 - 658
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