ISSN 1017-2548(Print)
ISSN 2234-8530(Online)
Volume 34, Number 6
JKCSEZ 34(6)
December 20, 1990 

High temperature superconducting films of YBa2Cu3O7-x were fabricated on the (100) single crystal faces of YSZ (yttria stabilized zirconia) and SrTiO3 by aerosol spray using ultrasonic atomization. The superconducting phase was formed by a three-step process: (a) spraying of a stoichiometric solution of nitrates of yttrium, barium, and copper on heated substrates kept at 250℃, (b) preheating of the sprayed films in air at 550℃, and (e) sintering of the films in flowing oxygen at 950℃, followed by furnace cooling. Resistances of the films were measured by the dc four-probe method and superconductivity was confirmed above the liquid nitrogen temperature.