Current time in Korea 08:50 Sep 20 (Fri) Year 2019 KCS KCS Publications
KCS Publications
My Journal Log In Register
HOME > Search > Browsing(JKCS) > Archives

Journal of the Korean Chemical Society (JKCS)

ISSN 1017-2548(Print)
ISSN 2234-8530(Online)
Volume 57, Number 1
JKCSEZ 57(1)
February 20, 2013 

 
Title
Particle Size Analysis of Chemical Mechanical Polishing (CMP) Powder Using Sedimentation Field-Flow Fractionation (SdFFF)

침강장-흐름분획법을 이용한 CMP 분말의 입자크기 분석
Author
Sol Kim, Sun Tae Kim, Dong Young Kang, Seungho Lee*

김솔, 김선태, 강동영, 이승호*
Keywords
Chemical Mechanical Polishing (CMP), Size distribution, Sedimentation field-flow fractionation (SdFFF), Transmission Electron Microscopy (TEM), Dynamic Light Scattering (DLS)
Abstract
No Abstract
Page
159 - 164
Full Text
PDF