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Journal of the Korean Chemical Society (JKCS)

ISSN 1017-2548(Print)
ISSN 2234-8530(Online)
Volume 57, Number 1
JKCSEZ 57(1)
February 20, 2013

Title	Particle Size Analysis of Chemical Mechanical Polishing (CMP) Powder Using Sedimentation Field-Flow Fractionation (SdFFF) 침강장-흐름분획법을 이용한 CMP 분말의 입자크기 분석
Author	Sol Kim, Sun Tae Kim, Dong Young Kang, Seungho Lee* 김솔, 김선태, 강동영, 이승호*
Keywords	Chemical Mechanical Polishing (CMP), Size distribution, Sedimentation field-flow fractionation (SdFFF), Transmission Electron Microscopy (TEM), Dynamic Light Scattering (DLS)
Abstract	No Abstract
Page	159 - 164
Full Text	PDF

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