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Bulletin of the Korean Chemical Society (BKCS)

ISSN 0253-2964(Print)
ISSN 1229-5949(Online)
Volume 16, Number 9
BKCSDE 16(9)
September 20, 1995 

Synthesis of Diamond-like Carbon Films on a TiO2 Substrate by DC-discharge Plasma Enhanced Chemical Vapor Deposition
Su-Jin Ku, Changmin Kim, Jong-Gi Jee*
A diamond-like carbon (DLC) film was produced on a TiO2 substrate using a plasma enhance chemical vapor deposition (PECVD) method. The CH4-H2 plasma was produced by applying 400 V DC. The DLC film with the best crystalline structure was obtained when the concentration of CH4 in H2 was 0.75 percent by volume and total pressure was 40 torr. The presence of the diamond structure was confirmed by Raman spectroscopy, X-ray diffraction, and scanning electron microscopy methods. It was found that the diluting gas H2 played an important role in producing a DLC film using a PECVD method.
813 - 818
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