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Journal of the Korean Chemical Society (JKCS)

ISSN 1017-2548(Print)
ISSN 2234-8530(Online)
Volume 42, Number 6
JKCSEZ 42(6)
December 20, 1998 

 
Title
Preparation and Characterization of Zinc Oxide Prepared by Spray Pyrolysis Method

열분무법으로 제조된 산화아연의 제법과 확인(I)
Author
Eui Jin, Young Soon Kim

진의, 김영순
Keywords
Abstract
아세트산아연으로부터 ITO유리전극위에 열분무법을 이용한 산화아연의 박막을 만들고, 박막 표면의 형태는 SEM으로 조사하였다. 산화아연 박막의 두께는 온도를 증가시키면 약 833 nm까지 증가하다가, 480℃ 부터는 오히려 감소하는 경향을 나타내었다. 분광 흡광도는 365 nm에서 관측되었고 형광 특성은 475 nm, 505 nm에서 최대의 세기를 나타내었다. 산화아연의 생성은 X선 광전자 분광 스펙트럼으로 확인하였으며, X선 회절 무늬로부터 (002) 면이 기질온도에 따라 우세한 방향으로 성장함을 알 수 있었다. 산화아연의 합성 최적의 온도는 X선 회절 무늬와 광전류의 측정값으로부터 460℃ 부근임을 확인하였다. 또한 산화아연의 입자의 크기가 균일할수록 광전류가 증가함을 알 수 있있다.

By using the spray pyrolysis method, zinc oxide(ZnO) was produced from zinc acetate, the surface morphology of the prepared films was investigated by using scanning electron microscopy. The thickness of ZnO thin film was increased up to 460℃ and it was 833 nm. The maximum wavelength of absorption was obtained at 365 nm, and the maximum peak of fluorescence at 475 nm and 505 nm. ZnO film have been characterized by XPS, XRD, and SEM. XRD results show that all the films are preferred orientation along the (002) plane which is depend on the substrate temperature. The optimal temperature to produce ZnO was determined at around 460℃ from measurements of XPS, XRD and photocurrent. It was also shown that the homogeneous particles had the higher photocurrent.

Page
638 - 645
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