ISSN 1017-2548(Print)
ISSN 2234-8530(Online)
Volume 37, Number 12
JKCSEZ 37(12)
December 20, 1993 

The thermal decomposition of trimethylaluminum (TMA) with ammonia has been investigated by in-situ Fourier transform infrared spectroscopy. The spectroscopic reaction cell, which permits heating interna lly up to 1100℃, consists of stainless-steel hexagonal-port chamber containing two NaCl windows installed in parallel. In this work, the stoichiometric reaction between TMA and NH3 is found to be completed immediately after mixing. FTIR spectra observed in the range of temperature 25∼1100℃ show that TMA and TMA : NH3 adduct decompose into methane as a predominant product around 500℃. The assignments of the IR bands due to the gaseous TMA, NH3 and TMA : NH3 adduct are attempted on the basis of the published data. Furthermore, the decomposition of TMA can be described as a first-order reaction. Kinetic data about the decompositon of TMA and TMA : NH3 adduct will also be discussed.