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Bulletin of the Korean Chemical Society (BKCS)

ISSN 0253-2964(Print)
ISSN 1229-5949(Online)
Volume 17, Number 11
BKCSDE 17(11)
November 20, 1996

Title	Study on the Development of CVD Precursors Ⅱ-Synthesis and Properties of New Lanthanum β-diketonates
Author	Jong Tae Lim, Sung Taeg Hong, Joong Cheol Lee, Ik-Mo Lee*
Keywords
Abstract	A new synthetic route for the lanthanum β -diketonate compounds via in-situ formed lanthanum alkyl complexes was developed in the process for the development of suitable MOCVD (metal-organic chemical vapor deposition) precursors of PLT, one of the promising material for the ferroelectric film. A series of lanthanum β-diketonate compounds were successfully synthesized by this method. This new method is found to have some merits; versatile method for almost every β -diketone, β-hydroxyketone, and β -hydroxyaldehyde, short reaction time, easy purification for high purity, moderate to high yield, and easy access to anhydrous compounds. In some cases, anhydrous oligomeric products fail to show the higher volatility. On the other hand, some lanthanum β-diketonates with aromatic groups such as La(1,3-biphenyl-l,3-propandione)3 are found to have favorable properties for a precursor of lanthanum oxide, one of major components of PLT, such as low melting point, and much higher decomposition temperature. A plausible pyrolysis mechanism is proposed by the TGA, where consecutive dissociation of R, CO, CH, C, and O fragments occurs.
Page	1023 - 1031
Full Text	PDF

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