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Bulletin of the Korean Chemical Society (BKCS)

ISSN 0253-2964(Print)
ISSN 1229-5949(Online)
Volume 16, Number 8
BKCSDE 16(8)
August 20, 1995 

Electrical Properties of TiO2-x Thin Films by Thermal Oxidation
Yong-Kook Choi*, Q-Won Choi, Ki-Hyung Chjo, Seung-Won Jeon
The electrical properties of the TiO2-x thin films prepared by thermal oxidation from titanium sheets have been studied. The films by water vapor oxidation are oxidized more homogeneously than those by air oxidation. The electrical contact to measure the electrical conductivity of the TiO2-x electrodes is improved when the electrode surface is plated with silver. The hysterisis of the electrical conductivity curves is improved by applying alternating current rather than direct current on both sides of the electrode. The observed energy gap, Ed are 0.05-0.16 and 0.11-0.76 eV, respectively, at low and high temperatures region. These values of the TiO2-x electrode prepared by water vapor oxidation are similar to those of single crystal TiO2. The values of donor concentration, Nd, are observed about 1015-1019 and 1017-1021 cm-3, respectively, at low and high temperatures region. These values obtained at high temperature region are consistent with the values obtained from Mott-Schottky plot.
709 - 715
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