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Bulletin of the Korean Chemical Society (BKCS)

ISSN 0253-2964(Print)
ISSN 1229-5949(Online)
Volume 15, Number 11
BKCSDE 15(11)
November 20, 1994

Title	Sensitivity and Error Propagation Factors for Three-Parameter Ellipsometry
Author	Hyeran Ihm, Gyusung Chung*, Woon-kie Paik, Duckhwan Lee
Keywords
Abstract	The sensitivity factors and the error propagation factors are defined for the three-parameter ellipsometry (TPE). The sensitivity factor is useful for understanding the nature of the TPE measurements in connection with determination of the optical properties and the thickness of a film. On the other hand, the error propagation factors provide a quantitative tool for predicting the optimum condition for TPE experiments. Their usefulness is demonstrated for the passive film formed on nickel in aqueous solution.
Page	976 - 980
Full Text	PDF

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