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Bulletin of the Korean Chemical Society (BKCS)

ISSN 0253-2964(Print)
ISSN 1229-5949(Online)
Volume 14, Number 2
BKCSDE 14(2)
February 20, 1993

Title	Preparation of Aluminum Nitride Thin Films Using Single Precursor OMCVD
Author	Joon T. Park*, June-Key Lee, Sehun Kim, Myung Mo Sung, Yunsoo Kim
Keywords
Abstract	none
Page	163 - 164
Full Text	PDF

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