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Bulletin of the Korean Chemical Society (BKCS)

ISSN 0253-2964(Print)
ISSN 1229-5949(Online)
Volume 14, Number 2
BKCSDE 14(2)
February 20, 1993 

 
Title
Preparation of Aluminum Nitride Thin Films Using Single Precursor OMCVD
Author
Joon T. Park*, June-Key Lee, Sehun Kim, Myung Mo Sung, Yunsoo Kim
Keywords
Abstract
none
Page
163 - 164
Full Text
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