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Bulletin of the Korean Chemical Society (BKCS)

ISSN 0253-2964(Print)
ISSN 1229-5949(Online)
Volume 32, Number 3
BKCSDE 32(3)
March 20, 2011 
 
Title
 Thermal Effect on Characteristics of IZTO Thin Films Deposited by Pulsed DC Magnetron Sputtering
Author
 Don Jin Son, Yoon Duk Ko, Dong Geun Jung, Jin Hyo Boo*, Sung Hoon Choa, Young Sung Kim*
Keywords
 TCO (transparent conducting oxide), IZTO (indium zinc tin oxide), Substrate temperature, Pulsed dc magnetron sputter
Abstract
 This study examined In-Zn-Sn-O (IZTO) films deposited on glass substrates by pulsed DC magnetron sputtering with various substrate temperatures. The structural, electrical, optical properties were analyzed. Xray diffraction showed that the IZTO films prepared at temperatures > 150 oC were crystalline which adversely affected the electrical properties. Amorphous IZTO films prepared at 100 oC showed the best properties, such as a low resistivity, high transmittance, figure of merit, and high work function of 4.07 ×10−4 Ω, 85%, 10.57 ×10−3 Ω−1, and 5.37 eV, respectively. This suggests that amorphous IZTO films deposited at relatively low substrate temperatures (100 oC) are suitable for electrode applications, such as OLEDs as a substitute for conventional crystallized ITO films.
Page
 847 - 851
Full Text
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