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Bulletin of the Korean Chemical Society (BKCS)

ISSN 0253-2964(Print)
ISSN 1229-5949(Online)
Volume 31, Number 4
BKCSDE 31(4)
April 20, 2010 

A Study on the Development of CVD Precursors VI-Thermal Properties of Co(III) 棺-Diketonates
Hanbin Lee, Choong Hyuk Lee, In Sook Oh, Ik Mo Lee*
Thermal properties, Co 棺-diketonates, CVD precursors, Isothermal TGA
Thermal properties of a series of Co 棺-diketonates have been systematically investigated and it is found that tris(3,5-heptanedionato) cobalt(III) (Co(hd)3) with the lowest melting point among them can be a better precursor than tris(2,2,6,6- tetramethyl-3,5-heptanedionato cobalt(III) (Co(tmhd)3), one of the most popular precursors to date, under suitable conditions. Isothermal TGA study shows that Co(hd)3 would work better at higher temperature, while Co(dmhd)3 would be a better precursor at lower temperature.
891 - 894
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