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Bulletin of the Korean Chemical Society (BKCS)

ISSN 0253-2964(Print)
ISSN 1229-5949(Online)
Volume 30, Number 1
BKCSDE 30(1)
January 20, 2009 

Properties of MTiO3 (M = Sr, Ba) and PbM'O3(M' = Ti, Zr) Superlattice Thin Films Fabricated by Laser Ablation
T M Lim, J Y Park, J S Han, P G Hwang, K H Lee, K W Jung*, D Jung*
Superlattice, Laser ablation, Ferroelectric
BaTiO3/SrTiO3 and PbTiO3/PbZrO3 superlattice thin films were fabricated on Pt/Ti/SiO2/Si substrate by the pulsed laser deposition process. The morphologies and physical properties of deposited films were characterized by using X-ray diffractometer, HR-SEM, and Impedance Analyzer. XRD data and SEM images of the films indicate that each layer was well deposited alternatively in the superlattice structure. The dielectric constant of BaTiO3/SrTiO3 superlattice thin film was higher than that of individual BaTiO3 or SrTiO3 film. Same result was obtained in the PbTiO3/PbZrO3 system. The dielectric constant of a superlattice film was getting higher as the number of layer is increased.
201 - 204
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