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Bulletin of the Korean Chemical Society (BKCS)

ISSN 0253-2964(Print)
ISSN 1229-5949(Online)
Volume 29, Number 2
BKCSDE 29(2)
February 20, 2008

Title	The Strategy to Fabricate the MTiO₃ (M = Sr, Ba) Thin Films by Laser Ablation
Author	T. M. Im, J. Y. Park, H. J. Kim, H. K. Choi, K. W. Jung, D. Jung
Keywords	Thin film, Laser ablation, Ferroelectrics, Crystallization
Abstract	BaTiO₃ and SrTiO₃ thin films were fabricated on Pt/Ti/SiO₂/Si substrate by the pulsed laser deposition process. The dependence of the deposited film quality upon the partial oxygen pressure during the deposition process was importantly examined. Regardless of the oxygen pressure, the as-deposited films were not fully crystallized. However, the film deposited at low oxygen pressure became well crystallized after the annealing process. It was concluded, therefore, that the partial oxygen pressure is reduced as low as possible during the deposition process and then anneal the as-deposited samples at ambient pressure to fabricate the well crystallized SrTiO₃ and BaTiO₃ films by laser ablation.
Page	427 - 430
Full Text	PDF

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